| 段力1，翁昊天1，姬中林1，谢子仪1，邹兵林2，王盈2.基于双层薄膜热电偶的热障涂层隔温温度精确测量[J].航空发动机,2020,46(5):49-54 |
| 基于双层薄膜热电偶的热障涂层隔温温度精确测量 |
| Accurate Measurement of Insulation Temperature of Thermal Barrier Coatings Based on Dual Thin-filmThermocouples |
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| DOI： |
| 中文关键词: 热障涂层 温度测量 薄膜传感器 微制造集成技术 隔温温度 航空发动机 |
| 英文关键词:thermal barrier coating （TBC） temperature measurement thin-film sensor Micro Electro-Mechanical System（MEMS） insulation temperature aeroengine |
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| 中文摘要: |
| 为了解决热障涂层隔温温度测量方法缺乏规范性及精确测量体系欠缺的问题，提出在热障涂层上、下两侧制作薄膜型
热电偶测量热障涂层隔温温度的试验方案，利用MEMS 工艺在热障涂层两侧实现Pt/PtRh 薄膜型（< 1 um 厚）热电偶微制造工艺，
进行热障涂层在高温热流动态环境下的隔温效果初步测定试验，并提出1 种热障涂层隔温效果的标准化测量体系与测量规范。结
果表明：该Pt/PtRh 薄膜型传感器可以测量1200 ℃左右的高温。 |
| 英文摘要: |
| In order to solve the problems of lack of measurement method standardization and accurate measurement system of thermal
barrier coating （TBC），a test scheme of making thin-film thermocouple on both sides of TBC was proposed to measure the insulation
temperature of TBC. Micro-manufacturing of Pt/PtRh thin-film （1 um thick）thermocouple was carried out on both sides of TBC by using
MEMS process. A preliminary test of thermal insulation effect was carried out for TBC under the dynamic environment of high temperature
heat flow，and a standardized measurement system and measurement specification were proposed for insulation effect of TBC. The results
show that the Pt/PtRh thin-film sensor can measure about 1200℃ high temperature。 |
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